Characterisation Tool

1. FR – SERIES - THIN FILM THICKNESS MEASUREMENT SYSTEMS

FR-pRo tool is assembled by user selected modules. The Core Unit accommodate the light source, the spectrometer (for any spectral regime in the 200nm- 2500nm range) and the control & communication electronics.

2. PROBE SYSTEMS ( MANUAL, SEMI & AUTOMATIC )

KEY FEATURES

Multiple applications with the same system – DC, High Frequency, OPTO, MEMS & more

Operates in three modes – automatic ( 24/7), semiautomatic and manual

Production & Analytical capabilities

Handles 150 and 200 mm wafers & substrates

Handles trays of die, wafers or wafers sawn on frames with dual end-effector

3. NANOMEZ™ WL 3500

KEY FEATURES The WL3500 is an automatic white light interferometry 3D profiler driven by a sub micron resolution XY Linear Motor stage. Designed on the basis of a solid granite tabletop gantry frame structure, it maximizes the stability of the interferometer, which is very sensitive to vibration, and measures the 3D structure and roughness of the 200mm / 300mm wafer surface precisely with the stable suction power of the variable vacuum chuck .

Email: support@higgsbosonsystems.com